Electrostatic Excitation for the Force Amplification of Microcantilever Sensors
نویسندگان
چکیده
منابع مشابه
Electrostatic Excitation for the Force Amplification of Microcantilever Sensors
This paper describes an electrostatic excited microcantilever sensor operating in static mode that is more sensitive than traditional microcantilevers. The proposed sensor comprises a simple microcantilever with electrostatic excitation ability and an optical or piezoresistive detector. Initially the microcantilever is excited by electrostatic force to near pull-in voltage. The nonlinear behavi...
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ژورنال
عنوان ژورنال: Sensors
سال: 2011
ISSN: 1424-8220
DOI: 10.3390/s111110129